In this section, the manufacturing requirements associated with advanced semiconductor lithography are discussed. This is followed by a discussion of lithographic approaches being used or being ...

Fig. 1 | Metalens-based DLW lithography. Schematic diagrams of (a) the DLW lithography setup, (b) the metalens and its constructing unit cells. (c) The metalens in top view and cross-section view. (d) ...

The production of multiscale architectures is of significant interest in materials science, and the integration of those structures could provide a breakthrough for various applications. Here we ...

The field of photonics has seen significant advances during the past decades, to the point where it is now an integral part of high-speed, international communications. For general processing ...