Non-Destructive Measurement of Bottom Width in Deep Trench Isolation Structures using IRCD Metrology
As scaling in semiconductor devices continues, the aspect ratios of deep trench isolation (DTI) structures have increased. DTI structures are used in power devices, power management ICs and image ...
The 2004 Sumatra earthquake generated one of the most destructive tsunamis ever recorded, with 100-foot waves that killed nearly 230,000 and resulted in an estimated $10 billion in damage. It also ...
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